TORSIONAL ACTUATION OF ORTHOTROPIC BEAM USING INCLINED PIEZOELECTRIC PATCHES

Direct torsional actuation of microcantilevers using magnetic excitation

Sensitivity on materials optical properties of single beam torsional Casimir actuation

A microgripper using piezoelectric actuation for micro-object manipulation

Design, fabrication and tests of a monolithic compliant-flexure-based microgripper were performed. The geometry design and the material tresses were considered through the finite element analysis. The simulation model was used to study in detail profiles of von Mises stresses nd deformation. The maximum stress in the microgripper is much smaller than the critical stress values for fatigue. The ...

Dual Beam Actuation of Piezoelectric AlN RF MEMS Switches Integrated with AlN Contour-mode Resonators

This work reports on piezoelectric Aluminum Nitride (AlN) based dual-beam RF MEMS switches that have been monolithically integrated with AlN contour-mode resonators. The dual-beam switch design presented in this paper intrinsically compensates for the residual stress in the deposited films, requires low actuation voltage (5-20 V), facilitates active pull-off to open the switch and fast switchin...

Dual-Beam Actuation of Piezoelectric AlN RF MEMS Switches Monolithically Integrated with AlN Contour-Mode Resonators

This work reports on piezoelectric Aluminum Nitride (AlN) based dual-beam RF MEMS switches that have been monolithically integrated with AlN contour-mode resonators. The dual-beam switch design presented in this paper intrinsically compensates for the residual stress in the deposited films, requires low actuation voltage (5 to 20 V), facilitates active pull-off to open the switch and exhibits f...